Nanometrics--advanced nanotechnology in metrological and industrial high- tech measuring processes.

Gheorghe, Ion Gheorghe

1. INTRODUCTION

Intelligent advanced micro-nanotechnologies integrated into NanoMetrology have been designed and developed in the research laboratories and the metrology laboratories in the Institute, with the view to using them in measurement processes for measurement, inspection and integrated control of intelligent and automated fabrications.

By applying the concepts of integrative and advanced knowledge, great accomplishments have been made in converging directions of nano-sciences and nanotechnologies, advanced nano micro- nanotechnology applications in NanoMetrology immediate and intelligent fabrications.

2. EXAMPLES OF ADVANCED MICRONANOTEHNOLOGIES INTEGRATE INTO NANOMETROLOGY:

At the National Institute of Research--Development for Mechatronics and Measurement Technique in Bucharest Romania has developed and integrated various intelligent technologies incorporated into Nanometrology, such as:

2.1 Intelligent control nanometric micro-nanotechnologies of surface topography--micro-roughness and microcontour (fig. 1), by integrating nanometric mechatronic system type "Form Talysurf T*H" with special and dedicated software programs for ultra-precise determinations of the microgeometry of surfaces--micro-roughness and micro-contour, (Coleman, 1989) approaching high metrological characteristics, as the axis resolutions of approx. 17 nm, the detector resolutions of approx. 8 nm, measuring range for the X axis of approx. 120 mm and for the Z axis of approx. 28 mm (for micro-contour) measuring range for the X axis of approx. and for the Z axis of approx. 1 mm (for micro-roughness).

[FIGURE 1 OMITTED]

The accuracy error of the nanometric mechatornic systems in the endowments of the laboratory was determined metrologically in the following value matrix:

Maximum error Maximum uncertainty

50 nm [+ or -] 25 nm
1800nin [+ or -] 1000 nin

Medium radio Maximum uncertainty

12,5 mm [+ or -] 25 nm
0,492 in [+ or -] 1000 nin

2.2 Advanced nanometric metrology calibration micronanotechnologies (Fig.2) for calibration / calibration of the full range of instrumentation and intelligent appliances and information [digital comparators, inductive / capacitive / Piezo electric / magnetic / photoelectric transducers etc.], on the measurement uncertainties [U95 = (20 + L / 1,000) nm] and with the measurement range [[+ or -] 10 nm], etc.

[FIGURE 2 OMITTED]

The nanometric accuracy error of the intelligent micrometrology mechatronic calibration laboratory was determined in the following value matrix (table 1):

Tab. 1. Matrix of the error determined in laboratory

 Real Admitted
Crt Position displacement displacement
no. (mm) (nm) (nm)

0 1 2 3

1 -10 200 -9
2 0 300 -74
3 10 400 -78
4 20 500 -98
5 30 600 -141
6 40 700 -129

 Admitted Real
Crt Position displacement displacement
no. (mm) [nm] [nm]

0 1 2 3

7 50 800 -180
8 60 900 -355
9 70 1000 -235
10 80 1100 -233
11 90 1200 -192

2.3 Intelligent nano-dimensional control nanometric micronanotechnologies for industrial micro-mechanical marks micro-nano-liniar and micro-nano-angular inspection (fig. 3), developed and made in the Institute, micro-mechatronic systems, high-tech micro-purpose type with Galileo Vision System, which allow automatic inspection of parts, fast, easy and ultra-precisely, using two monitors and a special software measurement, similar to Windows OS (Taniguchi, 2000).

[FIGURE 3 OMITTED]

By these micro-mechatronic systems, the intelligent uncertainties were determined by measuring [U = max (0.19 + 5L / 1,000) nm, L in mm], measuring (x = 300 mm, y = 150 mm, z = 140 mm) and measurement resolution (50 nm and 100 nm) with a special software for automatic recognition of features, generating protocol measurement, capturing video image formats: "jpg" or "bmp", with graphics and reporting capabilities importing data (files for "DXF" or "iges") for programming and exporting them. (Bhushan, 2007) The metrological verification of intelligent micro-mechatronic systems was conducted in the following matrix of values:

 point1 point2 point3 point4 point5

run 1 0.0000 25.4001 50.8002 76.2002 101.6004
run 2 0.0000 25.4002 50.8000 76.2002 101.6003
run 3 -0.0004 25.4011 50.7997 76.1999 101.6003

Maximun 0.0000 25.4011 50.8002 76.2002 101.6004
Minimum -0.0004 25.4001 50.7997 76.1999 101.6003

Average -0.0001 25.4004 50.8000 76.2001 101.6004

LEC 0.0000 25.4006 50.8001 76.2002 101.6005

In the laboratories of the Institute, the applications of these micro-mechatronic systems are used to determine micro-nanodimensional nanometric micro-linear and micro-angular deviations for terminal sizes, calibres, gauges, etc.., and to determine micro-deviations from parallelism and perpendicularity of parts in the following industrial environments: mechatronics, aerospace, autotronics, electrical, electronics, metrology, etc..

2.4 Micro-nanodimensional intelligent control nanometric micro-nanotehnologies--heights, for industrial micro marks (fig. 4), produced and developed in the Institute, by intelligent micro-systems type "Micro-HITE" (Gheorghe, 2007), that allow the determination of linear micro-nanodimensional deviations of height and dedicated software allowing data transfer to central units of the manufacturing process or central metrology process, determining the measurement uncertainty [U = max (0,2 + 3L / 1,000) nm, L in mm], the measurement ranges (max.350 nm), resolutions (100 nm) and accuracy ( [+ or -] 25, [+ or -] 50 nm).

The calibration of the intelligent micro-systems was carried out in metrological reference conditions according to EN/ ISO/ CEI 17025:2005, stated in the following value matrix (table 2):

Tab. 2. Matrix of metrologic calibration determined in
Laboratory

Crt. Norm Micro-system
no. length (mm) indication

1 50.000 50.000
2 125.000 125.000
3 150.000 150.000
4 200.000 199.9992
5 250.000 249.9993
6 300.000 299.9993
7 350.000 349.9995

2.5 Control micro-dimensional nano-scale micronanotechnology--3D (fig. 5) for industrial parts in automated manufacturing processes and metrological processes, were made and developed by an intelligent equipment type three coordinate measuring machine--LR and dedicated software for inspections meant to ensure ultra-standard geometries of industrial parts, inspections of special geometries (type camshaft, ball screw, etc.), geometry and micro-special-dimensional micro-parts nano-measuring (Cyichos, 2006), metrological characteristics uncertainty measuring [U = (90 + L/1000) nm, L in mm], measuring ranges (X = 1000 mm, Y = 700 mm Z = 560 mm) and resolution (10 nm 5 nm).

[FIGURES 4-5 OMITTED]

The volumetric error value of the intelligent equipment type 3D measuring machine, was determined in the following value matrix (table 3):

[TABLE 3 OMITTED]

3. CONCLUSIONS

In the development of the advanced micronanotechnologies field, the author and the specialized institute have addressed integrative concepts and new areas of scientific knowledge for implementation, testing and certification of nano-dimensional micro-micro- and micro-nano-angular, micro-heights, 3D, and interferometric monitoring and control.

4. REFERENCES

Taniguchi, Norio: Nanotehnologies, Technic Publishing House, 2000, Bucharest, Romania, ISBN 973-31-1508-8

Coleman, Hugh W.& Steel, W. Glenn Jr: Experimentation and uncertainty analysis for engineers; 1st ed. New York, 1989;

Gheorghe, Gh. Ion: Integrating engineering, CEFIN Publishing House, 2007, Bucharest, Romania-ISBN 978-973-870427-5

Cyichos, Horst: Mechatronik, Ed. VIEVEG, 2006, Berlin, Germania, ISBN-10 3-8348-0171-2; ISBN-13 978-38348-0171-58

Bhushan, Bharat: Hand book of Nano-technology, Ed. Springer, 2007, USA, ISBN 10: 3-540-29855-x; ISBN-13: 978-3-540-29855-7