期刊名称：International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN：1178-5608
出版年度：2016
卷号：9
期号：1
页码：1-20
出版社：Massey University
摘要：Micro/Nano electromechanical systems based Mass sensors are being increasingly usedfor detecting very low masses, with significant applications in bio-sensing as well as environmentalsensing. A number of different shapes, excitation mechanisms as well as materials have been suggestedfor these sensors. In addition, with reducing dimensions due to improvement in fabrication,these sensors have the potential to measure bacterial level masses. This paper reviews some of theresearch directions in this field. Various sensing and actuation strategies for these resonators are discussed.In addition, three important challenges, which have the potential of providing new directionsof research are also explored. These include quality factor, increasing nonlinearity and coupling.Coupling of sensors can provide a unique opportunity to build several resonant sensors on the samechip and reduce the number of contacts required as well as the potential bandwidth
关键词：Microelectromechanical systems; Mass sensors; damping; nonlinearity; coupled systems
