摘要：The ordinary gas sensor has low material utilization, high power consumption, temperature distribution uneven and poor consistency problems. Based on film processing technology, this paper designs a new structure of micro gas sensor. Triangle type design is first adopted in the structure, with platinum as the electrode material, ceramics substrate. Using ANSYS Workbench to analysis different size electrode and substrate that including the temperature field, stress field and the optimization design for substrate and electrode, the sensor can be uniform temperature distribution, stress of small and the effective control of power consumption, it is beneficial to improve the overall performance of the sensor. In addition, the sensor is tested to verify the accuracy of the finite element simulation
