期刊名称：Journal of Theoretical and Applied Information Technology
印刷版ISSN：1992-8645
电子版ISSN：1817-3195
出版年度：2013
卷号：48
期号：3
出版社：Journal of Theoretical and Applied
摘要：A hybrid method is used in simulating an inductively coupled Ar-Hg discharge plasma. In this hybrid model the combination of plasma fluid model and the Boltzmann Equation is applied. With this model, not only the �macroscopic� parameters of the discharge, such as electron density, electron temperature, can be simulated, but also the electron behavior can be derived, which is not accessible in mere fluid model.
