期刊名称：Journal of Theoretical and Applied Information Technology
印刷版ISSN：1992-8645
电子版ISSN：1817-3195
出版年度：2013
卷号：50
期号：1
出版社：Journal of Theoretical and Applied
摘要：In this paper five new ideas are proposed to integrate both an active RFID tag with a non-floating type thermal convection angular accelerometers on a flexible substrate, thus the device becomes a wireless sensor. The most innovative idea is to make it directly on the substrate without creating the grooved chamber of a traditional thermal convection accelerometer, and the device doesn�t use any movable parts, so it is very reliable and easy to make. The second new idea is to apply the engineering plastic such as polyimide, so the thermal conductivity of the new device substrate is much lower than silicon, and it can save much power and very useful in various fields. The third new idea is to use Xe gas in the chamber instead of the previous CO2; the latter can produce oxidation effect to the heater and thermal sensors, while Xe gas will not, so the heater and sensor reliability and life cycle can be increased. Trade-off study for the temperature sensor locations is also made. The sensitivity of the new device is 273/(rad/s2).
