出版社:The Institute of Image Information and Television Engineers
摘要:For the purpose of the improving luminous efficiency of PDP, a cathode featuring a low discharge voltage has been developed employing a thin film of Al electrode covered with Y2O3. This structure enables the cathode to have long life. By applying the Y2O3/A1 cathode, the DC-PDP can be operated using 100 V less than an ordinary panel can be using an Al cathode. In comparison to MgO as a protecting layer of AC-PDP, the Y2O3 has excellent secondary electron emission characteristics. In order to clarify the conduction mechanism, which is necessary for a dc discharge, the surface and depth profile of the cathode is examined with SEM, RBS, and AES. Many small cracks are found in the Y2O3, which are caused by the high-temperature process. From the cracks, an Al cathode bus line is sputtered during the aging process and the surface of the Y2O3 is covered with a thin island-like Al film and a conduction path is formed through the cracks.