摘要：This article proposes a novel method for identifying the motion errors (mainly straightness error and angular error) of a linear slide, which is based on the laser interferometry technique integrated with the shifting method. First, the straightness error of a linear slide incorporated with angular error (pitch error in the vertical direction and yaw error in the horizontal direction) is schematically explained. Then, a laser interferometry–based system is constructed to measure the motion errors of a linear slide, and an algorithm of error separation technique for extracting the straightness error, angular error, and tilt angle error caused by the motion of the reflector is developed. In the proposed method, the reflector is mounted on the slide moving along the guideway. The light-phase variation of two interfering laser beams can identify the lateral translation error of the slide. The differential outputs sampled with shifting initial point at the same datum line are applied to evaluate the angular error of the slide. Furthermore, the yaw error of the slide is measured by a laser interferometer in laboratory environment and compared with the evaluated values. Experimental results demonstrate that the proposed method possesses the advantages of reducing the effects caused by the assembly error and the tilt angle errors caused by movement of the reflector, adapting to long- or short-range measurement, and operating the measurement experiment conveniently and easily.
关键词：Motion errors; linear slide; laser interferometry; shifting method
