摘要：In order to increase the accuracy of a 6-axis motorized fiber alignment stage, a geometric and kinematic error model was established. A low-order body array was introduced to describe the general topological structure of the alignment stage; a homogeneous error transformation matrix was adopted to present the combination and kinematic errors of a typical case in a multi-body system; the structure and kinematic relationship of a 6-axis motorized fiber alignment stage as well as the corresponding error equation were built via the multi-body system error theory; the error distribution state and sensitivity characteristics of the 6-axis motorized fiber alignment stage were further analyzed; and the error compensation strategy was developed. The experimental results indicated that using inline error compensation for improving the alignment accuracy of the automatic alignment system for optical waveguide devices was very effective.
