摘要：Potassium dihydrogen phosphate is an important optical crystal. However, high-precision processing of large potassium dihydrogen phosphate crystal workpieces is difficult. In this article, surface roughness and subsurface damage characteristics of a (001) potassium dihydrogen phosphate crystal surface produced by traditional and rotary ultrasonic machining are studied. The influence of process parameters, including spindle speed, feed speed, type and size of sintered diamond wheel, ultrasonic power, and selection of cutting fluid on potassium dihydrogen phosphate crystal surface integrity, was analyzed. The surface integrity, especially the subsurface damage depth, was affected significantly by the ultrasonic power. Metal-sintered diamond tools with high granularity were most suitable for machining potassium dihydrogen phosphate crystal. Cutting fluid played a key role in potassium dihydrogen phosphate crystal machining. A more precise surface can be obtained in machining with a higher spindle speed, lower feed speed, and using kerosene as cutting fluid. Based on the provided optimized process parameters for machining potassium dihydrogen phosphate crystal, a processed surface quality with Ra value of 33 nm and subsurface damage depth value of 6.38 μm was achieved.
