摘要：There are increasingly urgent needs for low power, high performance, and low cost environmental sensor in environmental concentrator industry. A new type of MEMS environmental sensor based on MEMS thin film resistor and heat transduction is designed.Using clean room technology processing micron-size chip, help reduce post-production costs. Preliminary experiment results demonstrate that the output voltage signal is proportional to the environmental concentration in normal working range, and the detection accuracy can reach less than 1%
