期刊名称：Akademos: Revista de Ştiinţă, Inovare, Cultură şi Artă
印刷版ISSN：1857-0461
出版年度：2017
卷号：45
期号：2
页码：43
出版社：Academy of Sciences of Moldova
摘要：In this paper, Radio Frequency magnetron sputtering is described as a cost-effective and rapid methodfor obtaining new nanomaterials (semiconductors, metal, metal oxides etc.). Various 1D–3D nanostructures with a highcrystallinity are prepared and used to fabricate gas and pressure sensors based on them.
关键词：nanostructures; nanolayers; RF magnetron sputtering; sensor; pressure; ZnO; metal oxides.
