标题：Preparation and Characterization of Al-doped Zinc Oxide Films deposited by Ion-beam-Assisted Molecular Beam Epitaxy (MBE) and It's Dye Sensitized Solar Cell (DSSC) Application
期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2017
卷号：6
期号：3
页码：3134
DOI：10.15680/IJIRSET.2017.0603003
出版社：S&S Publications
摘要：Al-doped ZnO (AZO) thin films have been deposited onto glass substrates by ion-beam-assistedmolecular beam epitaxy (MBE) technique at room temperature, and the structural, optical and electrical properties ofthe films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, and hall effectmeasurement. The effect of the ion beam energy on the properties of the films has been studied. The optical parametershave been obtained by fitting the UV-transmittance spectra. It has been found that high quality AZO thin films of lowelectrical resistivity and high optical transmittance can be obtained at low ion beam energy at 300eV. In addition, theAZO films prepared by MBE could be applied as a transparent conducting electrode for the dye-sensitized solar-cells(DSSCs).
