期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2017
卷号：6
期号：6
页码：10621
DOI：10.15680/IJIRSET.2017.0606098
出版社：S&S Publications
摘要：The work aims at fabricating multi walled carbon nanotubes (MWCNTs) based sensor for sensingOxygen gas. The high quality MWCNTs were chemically synthesized by using Catalyst Chemical Vapour Deposition(CCVD) method with simultaneous treatment of Fe/Mo/Al2O3 catalyst in the presence of Hydrogen and Acetylene at850°C.MWCNTs was coated on the glass substrate using a polymeric mixture and electrical contacts were made usinga silver paste in order to measure the resistance. The surface morphology of sensor studied using Scanning ElectronMicroscope (SEM) and depicts the diameter of MWCNTs to be ~ 50 to 200 nm. For the various concentrations ofOxygen gas the resistance of the MWCNTs was found to decrease with time. This phenomenon was understood on thebasis of Oxygen–Carbon interactions. The sensitivity of the device improves significantly with increase in gasconcentration inside the chamber. Maximum sensitivity of about 2.0903% was achieved for the presently synthesizedMWCNTs, with response and recovery times of about 10 s and also shows the repeatability and reproducibility.
关键词：Catalyst Chemical Vapour Deposition; MWCNTs; Oxygen Gas Sensor; SEM.
