摘要：Recent upgrading of the Facility for Modification and Analysis of Materials with Ion Beams - FAMA, in the Laboratory of Physics of the Vinča Institute of Nuclear Sciences, included the modernization of its electron cyclotron resonance ion source. Since the old ion source was being extensively used for more than 15 years for production of multiply charged ions from gases and solid substances, its complete reconstruction was needed. The main goal was to reconstruct its plasma and injection chambers and magnetic structure, and thus intensify the production of multiply charged ions. Also, it was decided to refurbish its major subsystems - the vacuum system, the microwave system, the gas inlet system, the solid substance inlet system, and the control system. All these improvements have resulted in a substantial increase of ion beam currents, especially in the case of high charge states, with the operation of the ion source proven to be stable and reproducible. [Project of the Serbian Ministry of Education, Science and Technological Development, Grant no. III 45006]
关键词：ion source; plasma chamber; magnetic structure; ion beam
