摘要：The number of studies on microgrippers has increased consistently in the past decade, among them the numeric simulations and material characterization are quite common, while the metrological issues related to their performance testing are not well investigated yet. To add some contribution in this field, an image analysis-based method for microgrippers displacement measurement and testing is proposed here: images of a microgripper prototype supplied with different voltages are acquired by an optical system (i.e., a 3D optical profilometer) and processed through in-house software. With the aim to assess the quality of the results a systematic approach is proposed for determining and quantifying the main error sources and applied to the uncertainty estimation in angular displacement measurements of the microgripper comb-drives. A preliminary uncertainty evaluation of the in-house software is provided by a Monte Carlo Simulation and its contribution added to that of the other error sources, giving an estimation of the relative uncertainty up to 3.6% at 95% confidence level for voltages from 10 V to 28 V. Moreover, the measurements on the prototype device highlighted a stable behavior in the voltage range from 0 V to 28 V with a maximum rotation of 1.3° at 28 V, which is lower than in previous studies, likely due to differences in system configuration, model, and material. Anyway, the proposed approach is suitable also for different optical systems (i.e., trinocular microscopes).
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