摘要：A tilt compensation system is presented in this article to compensate the tilt in the translation micromirror used in miniaturized Fourier transform infrared spectrometers. This compensation system can not only be used for the micromirror tested in this article but also be applicable to any translation micromirror with undesired tilt about one fixed axis. The compensation system consists of only a compensation micromirror and a reflecting mirror. The compensation micromirror rotates an angle of the same magnitude and same direction as the translation micromirror’s tilt. The compensation micromirror has its rotation axis parallel to the tilting axis of the translation micromirror, which is identified using a position sensing detector–based setup introduced in the article. Experimental results show the tilt of the translation micromirror can be compensated to 0.026° from the original tilt of 0.24°.
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