摘要：For simultaneously measuring specimen’s surface morphology and material properties, multifrequency atomic force microscopy is often employed. In this kind of atomic force microscopy, if the probe’s higher-order resonance frequencies match the integer multiples of its fundamental frequency, the probe’s responses at such harmonic frequencies will be enhanced. Meanwhile, an enlarged effective slope during vibration at the probe’s tip results in an improved probe sensitivity. Moreover, increasing the probe’s natural frequency leads to a fast scanning speed. In this study, we propose to design cantilever probes that satisfy the aforementioned requirements via a structural optimization technique. A cantilever probe is represented by a three-layer symmetrical geometric model, and its width profile is continuously varied through the optimization procedure. Thereafter, an optimized design of probe considering the fifth harmonic is prepared by focused ion beam milling. Both simulation and experiment results show that the prepared probe agrees well with design requirements.
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