文章基本信息

标题：The improved Pt/ZnO/Al2O3 electrode for high temperature SAW sensors
作者：Xing Peng Liu ; Bin Peng
期刊名称：IOP Conference Series: Earth and Environmental Science
印刷版ISSN：1755-1307
电子版ISSN：1755-1315
出版年度：2018
卷号：189
期号：5
页码：052032
DOI：10.1088/1755-1315/189/5/052032
语种：English
出版社：IOP Publishing
摘要：In this study, Pt/ZnO/Al₂O₃ multilayer film were fabricated on La₃Ga₅SiO₁₄ substrates as the electrodes of surface acoustic wave (SAW) sensors working at high temperature. The Al₂O₃ film was employed as the first buffer layer to promote the crystalline qualities of the Pt and ZnO layers. This Pt/ZnO/Al₂O₃ sample was found to significantly improve the electrode's reliability at high temperature. After high temperature electrical measurement, the varied microstructures of the Pt/ZnO/Al₂O₃ electrodes were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM) to investigate its mechanism for stable resistance. The conductive stability of the Pt/ZnO/Al₂O₃ film was found to be improved at 800 °C by using Al₂O₃ buffer layer. This proposed ZnO/Al₂O₃ double buffer layers have great potential in improving the conductive stability of electrodes for SAW devices at high temperature.