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  • 标题:Fabrication of buried nanostructures by atomic layer deposition
  • 本地全文:下载
  • 作者:Rizwan Ali ; Muhammad Rizwan Saleem ; Matthieu Roussey
  • 期刊名称:Scientific Reports
  • 电子版ISSN:2045-2322
  • 出版年度:2018
  • 卷号:8
  • 期号:1
  • 页码:15098
  • DOI:10.1038/s41598-018-33036-3
  • 语种:English
  • 出版社:Springer Nature
  • 摘要:results in a smooth, nearly flat-top surface of the structure. Such a hard surface can be easily cleaned without damage, making the nanostructure reusable after contamination. The technique has wide applicability in resonance-domain diffractive optics and in realization of quasi-planar metamaterials. We discuss design issues of such optical elements and demonstrate the method by fabricating narrow-band spectral filters based on the guided-mode resonance effect. These elements have strong potential for, e.g., sensing applications in harsh conditions.
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