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  • 标题:Deep-UV photoinduced chemical patterning at the micro- and nanoscale for directed self-assembly
  • 本地全文:下载
  • 作者:Benjamin Leuschel ; Agnieszka Gwiazda ; Wajdi Heni
  • 期刊名称:Scientific Reports
  • 电子版ISSN:2045-2322
  • 出版年度:2018
  • 卷号:8
  • 期号:1
  • 页码:10444
  • DOI:10.1038/s41598-018-28196-1
  • 语种:English
  • 出版社:Springer Nature
  • 摘要:). The chemical properties were provided by self-assembled monolayers (SAMs), prepared on glass or silicon wafers. We first investigated their modification under our irradiation conditions (ArF laser) using AFM, XPS and contact angle measurements. Photopatterning was then demonstrated with minimum feature sizes as small as 75 nm, and we showed the possibility to regraft a second SAM on the irradiated regions. Finally, we used these chemically patterned surfaces for directed self-assembly of several types of objects, such as block copolymers, sol-gel materials and liquids by vapor condensation.
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