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  • 标题:Silver oxide decomposition mediated direct bonding of silicon-based materials
  • 本地全文:下载
  • 作者:Tomoki Matsuda ; Kota Inami ; Keita Motoyama
  • 期刊名称:Scientific Reports
  • 电子版ISSN:2045-2322
  • 出版年度:2018
  • 卷号:8
  • 期号:1
  • 页码:10472
  • DOI:10.1038/s41598-018-28788-x
  • 语种:English
  • 出版社:Springer Nature
  • 摘要:O paste, forming Ag nanoparticles (AgNPs). We demonstrate sound joints of Ag/silicon-based materials at 300-500 °C with the formation of a silicon oxide interlayer containing AgNPs. We propose that Ag in the interlayer attracted other Ag particles to the interface, playing a unique role in this direct bonding process. This process is suitable for various bonding applications in electronics, as well the fabrication of conducting paths for photovoltaic and other applications.
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