摘要：We report the fabrication of an array of random Silicon nanocones using a KrF excimer laser. A 370 nm thick amorphous Silicon layer deposited on a glass substrate was used in the process. The fabricated nanocones showed a large and broadband absorption enhancement over the entire visible wavelength range. An enhancement up to 350% is measured at λ = 650 nm. Additionally, the laser irradiation caused the nanocones to crystallize. The effect of changing the laser parameters (i.e. energy density, time, and frequency) on the morphology and the absorption is studied and compared. Wide-angle anti-reflective properties have been observed for the fabricated nanocones with less than 10% reflection for angles up to 60°. The major limitation of amorphous silicon thin film solar cells is the reduced absorption. This problem could be solved if light is trapped efficiently inside the thin film without the need of increasing the film thickness. The random array of nanocones presented in this work showed a substantial increase in absorption over a wide angle, were fabricated at a low cost and are easily scalable. This technique offers a fast approach which could significantly help in overcoming the absorption limitation.
