文章基本信息
- 标题:A soft lithographic approach to fabricate InAs nanowire field-effect transistors
- 本地全文:下载
- 作者:Sang Hwa Lee ; Sung-Ho Shin ; Morten Madsen 等
- 期刊名称:Scientific Reports
- 电子版ISSN:2045-2322
- 出版年度:2018
- 卷号:8
- 期号:1
- 页码:3204
- DOI:10.1038/s41598-018-21420-y
- 语种:English
- 出版社:Springer Nature
- 摘要:/Vs, indicating negligible material degradation during the SANE process.