文章基本信息
- 标题：Nitrogen implantation with a scanning electron microscope
- 本地全文：下载
- 作者：S. Becker ; N. Raatz ; St. Jankuhn 等
- 期刊名称：Scientific Reports
- 电子版ISSN：2045-2322
- 出版年度：2018
- 卷号：8
- 期号：1
- 页码：32
- DOI：10.1038/s41598-017-18373-z
- 语种：English
- 出版社：Springer Nature
- 摘要：N isotopes. We also show that this method is compatible with lithography techniques using e-beam resist, as demonstrated by the implantation of lines using PMMA.
