出版社：Samarskii Natsional'nyi Issledovatel'skii Universitet imeni Akademika S.P. Koroleva,Samara National Research University
摘要：A method of high-frequency laser ablation using a two-coordinate beam scanner for the fabrication of a diffractive element of terahertz range with a continuous profile has been developed and successfully applied. Results of the characterization of the fabricated microrelief of a silicon focuser of a Gaussian beam into a square region are presented.
