出版社：Faculty of Humanities, Kaunas University of Technology
其他摘要：Electrical resistance of the vacuum-deposited condensate has non-linear relation to the condensate film thickness. Therefore, there exists a need for experiments to study applicability of the non-invasive method for condensate resistance measurement and to identify parameters by measuring condensate resistance directly. By using two-point measurement probes, this study analyses the influence of electrons emitted in the process of evaporator electronic emission on the method for direct measurement of condensate resistance. DOI: http://dx.doi.org/10.5755/j01.eee.20.2.6379
关键词：Thin film devices;vacuum technology;electrical resistance measurement
