摘要：The effects of TiN-ZrO2 intermediate layer on the microstructures and magnetic properties of FePt films were investigated. The TiN-ZrO2 intermediate layer was granular consisting of grains of solid solution of Ti(Zr)ON segregated by amorphous ZrO2. By doping ZrO2 into TiN intermediate layer, the FePt grains became better isolated from each other and the FePt grain size was reduced. For 20 vol. % ZrO2 doping into TiN, the grain size decreased dramatically from 11. 2 nm to 6. 4 nm, and good perpendicular anisotropy was achieved simultaneously. For the FePt 4nm-SiO2 35 vol. % -C 20 vol. % films grown on top of the TiN-ZrO2 20 vol. % intermediate layer, well isolated FePt (001) granular films with coercivity higher than 18. 1 kOe and an average size as small as 6. 4 nm were achieved.
