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  • 标题:Effect of grain orientations of Cu seed layers on the growth of -oriented nanotwinned Cu
  • 本地全文:下载
  • 作者:Chien-Min Liu ; Han-Wen Lin ; Chia-Ling Lu
  • 期刊名称:Scientific Reports
  • 电子版ISSN:2045-2322
  • 出版年度:2015
  • 卷号:4
  • 期号:1
  • DOI:10.1038/srep06123
  • 语种:English
  • 出版社:Springer Nature
  • 摘要:We investigate the growth of Cu films on two different Cu seed layers: one with regular -oriented grains and the other with very strong -preferred orientation. It is found that densely-packed nanotwinned Cu (nt-Cu) can be grown by pulsed electroplating on the strong -oriented Cu seed layer without a randomly-oriented transition layer between the nt-Cu and the Cu seed layer. The electroplated nt-Cu grow almost epitaxially on the seed layer and formed -oriented columnar structures. However, with the regular -oriented Cu seed, there is a randomly-oriented transition layer between the nt-Cu and the regular -oriented Cu seed. The results indicate that the seed layer plays a crucial role on the regularity of -oriented nanotwinned Cu.
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