摘要：Resistivity changes of magnetron sputtered, amorphous Cr 2 AlC thin films were measured during heating in vacuum. Based on correlative X-ray diffraction, in-situ and ex-situ selected area electron diffraction measurements and differential scanning calorimetry data from literature it is evident that the resistivity changes at 552 ± 4 and 585 ± 13 °C indicate the phase transitions from amorphous to a hexagonal disordered solid solution structure and from the latter to MAX phase, respectively. We have shown that phase changes in Cr 2 AlC thin films can be revealed by in-situ measurements of thermally induced resistivity changes.
