摘要:This paper studied and realized a flexible nanogenerator based on P(VDF-TrFE) nanofibers and PDMS/MWCNT thin composite membrane, which worked under triboelectric and piezoelectric hybrid mechanisms. The P(VDF-TrFE) nanofibers as a piezoelectric functional layer and a triboelectric friction layer are formed by electrospinning process. In order to improve the performance of triboelectric nanogenerator, the multiwall carbon nanotubes (MWCNT) is doped into PDMS patterned films as the other flexible friction layer to increase the initial capacitance. The flexible nanogenerator is fabricated by low cost MEMS processes. Its output performance is characterized in detail and structural optimization is performed. The device's output peak-peak voltage, power and power density under triboelectric mechanism are 25 V, 98.56 μW and 1.98 mW/cm(3) under the pressure force of 5 N, respectively. The output peak-peak voltage, power and power density under piezoelectric working principle are 2.5 V, 9.74 μW, and 0.689 mW/cm(3) under the same condition, respectively. We believe that the proposed flexible, biocompatible, lightweight, low cost nanogenerator will supply effective power energy sustainably for wearable devices in practical applications.