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  • 标题:Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment
  • 本地全文:下载
  • 作者:Donghan Ma ; Yuxuan Zhao ; Lijiang Zeng
  • 期刊名称:Scientific Reports
  • 电子版ISSN:2045-2322
  • 出版年度:2017
  • 卷号:7
  • 期号:1
  • DOI:10.1038/s41598-017-01099-3
  • 语种:English
  • 出版社:Springer Nature
  • 摘要:Large-area holographic gratings are of great importance in diverse fields including long-range interference metrology, high-resolution astronomical telescopes, and chirped-pulse-amplification systems. However, in conventional interference lithography, the recording length is limited by the aperture of the collimating lenses. Here we propose broad-beam scanning exposure which employs the latent grating generated continuously during scanning for real-time dynamic fringe locking and thus achieves unlimited recording length. This method is experimentally proved to make high-quality gratings, and is expected to be a new type of interference lithography.
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