ABSTARCT:The thin film Li-ion batteries have been extensively used in micro-electronic devices due to their miniaturization, high capacity density and environmental friendliness, etc. In order to further prolong the lifetime of the film batteries, one of important tasks is to explore the aging mechanisms of the cathode films. In this paper, we especially focused on the multi-characterization of the LiCoO2 film in nanoscale, which is carried out by combining advanced AFM-based techniques with capacity measurement. The surface morphology, contact stiffness as well as surface potential were measured by amplitude modulation-frequency modulation (AM-FM) and kelvin probe force microscope (KPFM), respectively. Remarkable changes after different numbers of charge/discharge cycling were observed and the intrinsic reasons of them were discussed in detail. To acknowledge the relationship with these microscopic changes, the macro-capacity of the thin films was also measured by the galvanostatic charge/discharge method. These comprehensive results would provide a deep insight into the fading mechanism of the cathode film, being helpful for the design and selection of the cathode film materials for high performance batteries.