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  • 标题:Coupling-enhanced dual ITO layer electro-absorption modulator in silicon photonics
  • 本地全文:下载
  • 作者:Mohammad H. Tahersima ; Zhizhen Ma ; Yaliang Gui
  • 期刊名称:Nanophotonics
  • 印刷版ISSN:2192-8606
  • 电子版ISSN:2192-8614
  • 出版年度:2019
  • 卷号:8
  • 期号:9
  • 页码:1559-1566
  • DOI:10.1515/nanoph-2019-0153
  • 出版社:Walter de Gruyter GmbH
  • 摘要:Electro-optic signal modulation provides a key functionality in modern technology and information networks. Photonic integration has not only enabled miniaturizing photonic components, but also provided performance improvements due to co-design addressing both electrical and optical device rules. The millimeter to centimeter footprint of many foundry-ready electro-optic modulators, however, limits density scaling of on-chip photonic systems. To address these limitations, here we experimentally demonstrate a coupling-enhanced electro-absorption modulator by heterogeneously integrating a novel dual-gated indium-tin-oxide phase-shifting tunable absorber placed at a silicon directional coupler region. This concept allows utilizing the normally parasitic Kramers-Kronig relations here in an synergistic way resulting in a strong modulation depth to insertion loss ratio of about 1. Our experimental modulator shows a 2 dB extinction ratio for a just 4 μm short device at 4 V bias. Since no optical resonances are deployed, this device shows spectrally broadband operation as demonstrated here across the entire C-band. In conclusion, we demonstrate a modulator utilizing strong index change from both real and imaginary parts of active material enabling compact and high-performing modulators using semiconductor near-foundry materials.
  • 关键词:electro-absorption modulators ; indium tin oxide ; directional coupling ; broadband operation
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