期刊名称：International Journal on Electrical Engineering and Informatics
印刷版ISSN：2085-6830
出版年度：2019
卷号：11
期号：2
页码：263-271
DOI：10.15676/ijeei.2019.11.2.3
出版社：School of Electrical Engineering and Informatics
摘要：ZnO deposition parameters and layer characterizations of the film which is havingoptoelectronic and piezo electric properties can play an important role in the realization ofreliable MEMS based sensor. Sensor performance is based on the material characteristics suchas crystal orientation, thickness, surface morphology; dielectric constants which employs variouscharacterization techniques and methodologies. The grain size, FWHM, reflectance and bandgap of the deposited layers are also critical and varying with deposition parameters such assubstrate and annealing temperature. Various trial runs to optimize the process parameter andsubsequent characterization of the film under various conditions are detailed in this article.Further the effect of moisture on the film quality is plotted and comparative analysis with andwithout humidity is bought out.
