摘要：We present a computer-aided design tool for ion optical devices using the adjoint variable method. Numerical methods have been essential for the development of ion optical devices such as electron microscopes and mass spectrometers. Yet, the detailed computational analysis and optimization of ion optical devices is still onerous, since the governing equations of charged particle optics cannot be solved in closed form. Here, we show how to employ the adjoint variable method on the finite-element method and Störmer-Verlet method for electrostatic charged particle devices. This method allows for a full sensitivity analysis of ion optical devices, providing a quantitative measure of the effects of design parameters to device performance, at near constant computational cost with respect to the number of parameters. To demonstrate this, we perform such a sensitivity analysis for different freeform N-element Einzel lens systems including designs with over 13,000 parameters. We further show the optimization of the spot size of such lenses using a gradient-based method in combination with the adjoint variable method. The computational efficiency of the method facilitates the optimization of shapes and applied voltages of all surfaces of the device.
