摘要：In this research thin films of Barium Strontium Titanate (BST) has been synthesis with different compositions Ba 0,5 Sr 0,5 TiO 3 and Ba 0,25 Sr 0,75 TiO 3 which doped by Nb 2 O 5 (Niobium) and Ta 2 O 5 (Tantalum) on Si (100) type-p substrate. Thin films were produced by chemical solution deposition technique (CSD) and spin coating technique with annealing temperature at 850 o C, 900 o C dan 950 o C. Rotation velocity at 3000 rpm and time of rotation is 30 seconds. Characterization of Films is optic Characterization (absorbance ana reflectance). From the Characterizations were obtained BNST thin film with 5% doping and anneling temperature at 850 0 C as photodiode light sensor which applied in electronic circuit.
其他摘要：In this research thin films of Barium Strontium Titanate (BST) has been synthesis with different compositions Ba 0,5 Sr 0,5 TiO 3 and Ba 0,25 Sr 0,75 TiO 3 which doped by Nb 2 O 5 (Niobium) and Ta 2 O 5 (Tantalum) on Si (100) type-p substrate. Thin films were produced by chemical solution deposition technique (CSD) and spin coating technique with annealing temperature at 850 o C, 900 o C dan 950 o C. Rotation velocity at 3000 rpm and time of rotation is 30 seconds. Characterization of Films is optic Characterization (absorbance ana reflectance). From the Characterizations were obtained BNST thin film with 5% doping and anneling temperature at 850 0 C as photodiode light sensor which applied in electronic circuit.
