摘要：A novel planar distributed three-beam electron gun with narrow beam separations is designed based on grids loaded sheet beam method. The dimensions of the three-beam gun in the y–O-z plane are determined using our basic theoretical design method developed for sheet beam gun. The results show that the profile of focusing electrode in the y–O-z plane is related to the beam width in the x-O-z plane. Then, the characteristics and parameters of three-beam array formation with their stability are analyzed thoroughly by adjustment of control grids in the x-O-z plane. Each of the beamlet obtained is with a small axial deviation of the two transverse waists. Based on the theoretical analysis and simulations, the planar three-beam electron gun is constructed with the beam voltage of 22 kV and the current of 3 $$ imes$$ 0.15 A. The average radius of 0.08 mm at each beam waist is obtained with the compression factor of 4 for the 0.18 mm beam tunnel radius. The beam waist can be achieved at about 4.4 mm away from the cathode with the axis separation about 0.46 mm for each of beamlet. Thus, the design method can be generally used to construct such type of narrow beam separation and planar distributed multiple beam electron gun for the miniaturization and integrated vacuum electron devices in millimeter wave and terahertz band.
