摘要：Recently, detecting biological particles by analyzing their mechanical properties has attracted increasing attention. To detect and identify different bioparticles and estimate their dimensions, a mechanical nanosensor is introduced in this paper. To attract particles, numerous parts of the substrate are coated with different chemicals as probe detectors or receptors. The principal of cell recognition in this sensor is based on applying an electrical excitation and measuring the maximum deflection of the actuated cantilever electrode. Investigating the critical voltage that causes pull-in instability is also important in such highly-sensitive detectors. The governing equation of motion is derived from Hamilton’s principle. A Galerkin approximation is applied to discretize the nonlinear equation, which is solved numerically. Accuracy of the proposed model is validated by comparison studies with available experimental and theoretical data. The coupled effects of geometrical and mechanical properties are included in this model and studied in detail. Moreover, system identification is carried out to distinguish bioparticles by a stability analysis. Due to the absence of a similar concept and device, this research is expected to advance the state-of-the-art biosystems in identifying particles.
