摘要：In high-end testing and manufacturing equipment, a trend exists whereby the traditional servo feed system with a ball screw and rotary motor will gradually be replaced by a direct drive system. The precision motion system driven by a permanent magnet linear synchronous motor (PMLSM) offers several advantages, including high speed, high acceleration, and high positioning accuracy. However, the operating precision of the feed device will be affected by the PMLSM robustness to nonlinear and uncertain disturbances, such as cogging force, friction, thermal effects, residual vibration, and load disturbance. The aim of this paper was to provide a survey on disturbance analysis and suppression approaches to improve the dynamic performance of PMLSM motion systems. First, the origin and inhibition methods of thrust ripple and friction are presented. Second, the mechanisms, modeling approaches, and mitigation measures of thermal effects are introduced. Additionally, the residual vibration characteristics and suppression methods are discussed. Finally, disturbance observers of periodic and aperiodic loads are introduced. These suppression methods from structural design and control compensation are then discussed in order to improve the dynamic response and steady-state accuracy of PMLSM.
关键词：permanent magnet linear synchronous motor; motion control; thermal effect; thrust ripple; compensation method; residual vibration; load disturbance permanent magnet linear synchronous motor ; motion control ; thermal effect ; thrust ripple ; compensation method ; residual vibration ; load disturbance
