摘要：Increasing demands for smaller and smarter devices in a variety of applications requires the investigation of process-machine-interactions in micro manufacturing to ensure process results that guarantee part functionality. One approach is the use of simulation-based physical models. In this contribution, methods for the physical modeling of high-precision air bearing and magnetic bearing spindles are presented in addition to a kinematic model of the micro milling process. Both models are superimposed in order to carry out investigations of the slot bottom surface roughness in micro end milling. The results show that process-machine-interactions in micro manufacturing can be modeled by the superposition of a physical model of the machine tool spindle taking cutting forces into consideration and a purely kinematic model of the machining process, providing the necessary tools for a variety of further investigations into process-machine-interactions in micro manufacturing.
关键词：multiphysics; air bearing; magnetic bearing; surface roughness modeling; micro milling
