文章基本信息

标题：Effect of TiO2 nano-overlays deposited with atomic layer deposition on refractive index sensitivity of long-period gratings
本地全文：下载
作者：Krzysztof Krogulski ; Mateusz Śmietana ; Bartosz Michalak 等
期刊名称：International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN：1178-5608
出版年度：2020
卷号：7
期号：5
页码：1-5
DOI：10.21307/ijssis-2019-061
出版社：Massey University
摘要：This paper we discusses an effect of coating longperiod gratings (LPGs) with a thin titanium dioxide (TiO 2 ) overlays on refractive index (RI) sensitivity of the LPG. The overlays have been obtained using atomic layer deposition (ALD) method. The method allows for deposition well-controlled in thickness, well defined in optical properties, high-RI and very conformal thin films as required for optical fiber sensors. For the investigated LPGs we obtained sensitivity of 3490 to 6471 nm per RI unit depending on range RI.
其他关键词：Atomic Layer Deposition (ALD); thin films; longperiod gratings (LPGs); titanium dioxide (TiO2 ); optical fiber sensors; refractive index sensing