文章基本信息
- 标题：3D Nano-analysis Technology for Preparing and Observing Highly Integrated and Scaled-down Devices in QTAT
- 本地全文：下载
- 作者：Toshie Yaguchi ; Takeo Kamino ; Tsuyoshi Ohnishi 等
- 期刊名称：Hitachi Review
- 印刷版ISSN：0018-277X
- 出版年度：2005
- 卷号：54
- 期号：1
- 出版社：Hitachi Ltd
- 关键词：focused ion beam; scanning transmission electron microscope; micro sampling technique; 3D device evaluation; failure analysis
