摘要：The boundary element method (BEM) is used in this work for modelling the fluid
flow around a vibrating micro-electro-mechanical system (MEMS). Device motion
induces flow and, therefore, drag-forces develop on the surface of the MEMS
with a damping effect on the MEMS vibration. We assume that the fluid around
MEMS can be treated as a continuum and, further on, that the flow can be
modelled as incompressible with a very low Reynolds number. Under such
conditions, met in a large number of MEMS in practice, the fluid flow can be
accurately described by Stokes theory of quasi-steady incompressible flow. We
take into account MEMS deformation effects on fluid flow analysis. Fast
integration is performed using the collocation method. Self-integrals containing
singular kernels are analytically computed over linear triangles. This
model has been computationally implemented into the engineering software
OOFELIE:MEMS, developed by Open Engineering SA. The accuracy of the model
is tested using a benchmark problem – the flow around a sphere moving with
constant velocity–, with satisfactory results. Preliminary results of an
application to MEMS are also shown.
