The advent of precision three-dimensional micro machining technologies in the last couple of decades has seen the birth of an exciting and potentially revolutionary field called Microelectromechanical Systems (MEMS). The complexity of Microsystems is steadily increasing due to the scaling of microelectronic devices.
Looking at the MEMS devices, the moment the moving elements touch the static part of the system will have a major influence on the overall performance of the device. Hence one definitely needs to consider the touchdown effect in the system behavior .This paper gives a numerical integration approach of capacitive MEMS characteristics modeling.