文章基本信息
- 标题：Design and Construction of Micro Fabrication Cleanroom for Teaching Microelectronic Undergraduate
- 作者：Uda Hashim ; Zul Azhar Zahid Jamal ; KC Phang 等
- 期刊名称：Elektrika: Journal of Electrical Engineering
- 印刷版ISSN：0128-4428
- 出版年度：2008
- 卷号：8
- 期号：02
- 出版社：Faculty of Electrical Engineering, University Teknologi Malaysia
- 关键词：Air shower; De-ionized water; Fan filter unit; Micro fabrication cleanroom; Scrubber system.
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