期刊名称：International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN：1178-5608
出版年度：2009
卷号：2
期号：03
页码：345-380
出版社：Massey University
摘要：This article presents an optical measurement method for acquiring rapidly accurate
geometric 3-D surface morphology of objects. To achieve high-speed profilometry and avoid
disturbance due to in-field vibration, one-shot Fourier transform profilometry (FTP) using twowavelength
digital moiré pattern was developed to detect the morphology of the measured object at a
speed of up to 60 frames or more per second. Single-fringe interferogram sufficient for FTP can be
rapidly captured within a theoretical CCD acquisition time of down to 1 μs. The interferogram thus
captured can be applied for further phase retrieving using the developed frequency transform and
band-pass filtering strategies. The band-pass filter is designed to obtain phase information for
optimizing the 3-D surface reconstruction with both dimensional and structural measurement accuracy.
Furthermore, a standard step-height target was measured to analyze accuracy and repeatability of the
developed methodology. Experimental results verified that the measurable step height can be effectively
increased using the equivalent wavelength established by analyzing two-frequency moiré pattern, thus
increasing practical applicability of the developed system while achieving a micro-scale measuring
depth resolution. The maximum measured error can be kept within 3.5% of the overall measuring
range.
