期刊名称：International Journal on Smart Sensing and Intelligent Systems
印刷版ISSN：1178-5608
出版年度：2009
卷号：2
期号：03
页码：503-514
出版社：Massey University
摘要：RF sputtered SnO2 thin films (90 nm thick) loaded with clusters of nanoscale (8 nm) metal catalysts (Pt, Ag, Ni, Pb, Al, Pd) are investigated for LPG detection. SnO2 film loaded with Pt catalyst clusters exhibits enhanced response (~ 7.5×102) to 200 ppm of LPG at a relatively low operating temperature (185oC) with a fast response time of 100s. Variation of thickness of Pt clusters in the nanoscale range (2 to 20 nm) is seen to significantly influence the sensor response characteristics. Enhanced performance is observed for SnO2 thin films loaded with 10 nm thick platinum clusters that exhibited a high response (~ 5 x 103) at an operating temperature, of 220oC. Preliminary results indicate the potential application of prepared sensor structure of Pt clusters (10nm)/SnO2 (90 nm)/IDE/glass substrate for efficient detection of LPG at relatively low temperature.
