Based on the metal-ions-from-volatile-compounds (MIVOC) method with the mVINIS ion source, we have produced multiply charged ion beams from solid substances. Highly in tense, stable multiply charged ion beams of several solid substances with high melting points were extracted by using this method. The spectrum of multiply charged ion beams obtained from the element hafnium is presented here. For the first time ever, hafnium ion beam spectra were recorded at an electron cyclotron resonance ion source. Multiply charged ion beams from solid substances were used to irradiate the polymer, fullerene and glassy carbon samples at the channel for the modification of materials.