摘要:Cadmium Telluride (CdTe) is one of the most important compound that belongs to group II–VI largely due to its use as photonic material. Existing applications, as well as those under consideration, are demanding increasingly the stringent control of the material properties. The present investigations are centered around the surface characterization of CdTe thin films. Thin films of CdTe with thickness of around 4000Å have been deposited by thermal evaporation method at room temperature. Surface morphology of such films was studied using SEM (Scanning Electron Microscopy) and AFM (Atomic Force Microscopy). AFM provides very useful numerical data of surface height at digitized locations on a film. Various analysis have been developed to utilize the data, including the root-mean square of height, fractional analysis and Power Spectrum Density (PSD) etc. Needless to say, thise analyses are aiming at finding appropriate morphological parameters to interpret physical properties of the films or studying the growth mechanism in films.