摘要：Recently ozone is one of natural hazards which comes from cars, industry using ozone for sterilization of organic and inorganic materials and for water purification. So, ozone sensing becomes very important, and convenient and accurate ozone sensor is required. A new high sensitivity ozone sensing system using an deep ultra-violet light emitting diode (DUV-LED) operated at the wavelength of 280 nm has been successfully constructed. The fabrication of diode operated at 280 nm is much easier than that of DUV-LED operated at Hg lamp wavelength of 254 nm. The system is compact and possible to sense the ozone concentration less than 0.1 ppm with an accuracy of 0.5% easily with low power DUV-LED of around 200 micro Watts operated at 280 nm without any data processing circuit.
关键词：Ozone Sensing; Deep Ultra Violet Light Emitting Diode; DUV-LED; High Sensitivity; Long Life; Compact
